Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

E Serra, M Bonaldi, A Borrielli, L Conti, G Pandraud, PM Sarro

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1485-1488
Number of pages4
JournalProcedia Engineering
Publication statusPublished - 2014

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