Original language | English |
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Pages (from-to) | 1485-1488 |
Number of pages | 4 |
Journal | Procedia Engineering |
Volume | 87 |
DOIs | |
Publication status | Published - 2014 |
Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties
Research output: Contribution to journal › Conference article › Scientific › peer-review
2
Citations
(Scopus)