Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

E Serra, M Bonaldi, A Borrielli, L Conti, G Pandraud, PM Sarro

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@article{51a29a6180c7443fb46cfead40385ccd,

title = "Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties",

author = "E Serra and M Bonaldi and A Borrielli and L Conti and G Pandraud and PM Sarro",

year = "2014",

doi = "10.1016/j.proeng.2014.11.579",

language = "English",

volume = "87",

pages = "1485--1488",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

}

TY - JOUR

T1 - Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

AU - Serra, E

AU - Bonaldi, M

AU - Borrielli, A

AU - Conti, L

AU - Pandraud, G

AU - Sarro, PM

PY - 2014

Y1 - 2014

U2 - 10.1016/j.proeng.2014.11.579

DO - 10.1016/j.proeng.2014.11.579

M3 - Conference article

SN - 1877-7058

VL - 87

SP - 1485

EP - 1488

JO - Procedia Engineering

JF - Procedia Engineering

ER -