@inproceedings{1de01bd9e06149e181504389363d061b,
title = "Selective Solid-Phase Epitaxy of Ultra-Shallow p+ Aluminum-Doped Silicon Junctions for Integration in Nanodevices",
keywords = "conference contrib. refereed, Geen BTA classificatie",
author = "Y Civale and LK Nanver and P Hadley",
year = "2006",
language = "Undefined/Unknown",
publisher = "Electron Device Society",
pages = "55--56",
booktitle = "Proc. IEEE Silicon Nanoelectronics Workshop",
note = "IEEE Silicon Nanoelectronics Workshop ; Conference date: 11-06-2006 Through 12-06-2006",
}