Selective Solid-Phase Epitaxy of Ultra-Shallow p+ Aluminum-Doped Silicon Junctions for Integration in Nanodevices

Y Civale, LK Nanver, P Hadley

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. IEEE Silicon Nanoelectronics Workshop
Place of PublicationHonolulu, USA
PublisherElectron Device Society
Pages55-56
Number of pages2
Publication statusPublished - 2006
EventIEEE Silicon Nanoelectronics Workshop - Honolulu, USA
Duration: 11 Jun 200612 Jun 2006

Publication series

Name
PublisherElectron Device Society

Conference

ConferenceIEEE Silicon Nanoelectronics Workshop
Period11/06/0612/06/06

Keywords

  • conference contrib. refereed
  • Geen BTA classificatie

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