Selective Solid-Phase Silicon Epitaxy of p+ Aluminum-Doped Contacts for Nanoscale Devices

Y Civale, LK Nanver, H Schellevis

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)196-200
Number of pages5
JournalIEEE Transactions on Nanotechnology
Issue number2
Publication statusPublished - 2007


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  • CWTS 0.75 <= JFIS < 2.00

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