TY - JOUR
T1 - Self-aligned micro-optic integrated photonic platform
AU - Jovic, Aleksandar
AU - Losilla, Nuria Sanchez
AU - Durá, Juan Sancho
AU - Zinoviev, Kirill
AU - Guivernau, Jose Luis Rubio
AU - Margallo-Balbás, Eduardo
AU - Mastrangeli, Massimo
AU - Pandraud, Grégory
AU - Sarro, Pasqualina M.
N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
PY - 2020
Y1 - 2020
N2 - In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45◦ reflecting mirror that directs the light from the interferometer to the collimator. The proposed integration process simplifies the fabrication of an interferometric system and inherently overcomes the complexity of costly alignment procedures while complying with the necessarily stringent optical constraints. Fabricated waveguide characterization shows total optical losses as low as 3 dB, and less than 1 dB of additional loss due to the Si 45◦ mirror facet. The alignment standard deviation of all components is within 15 nm. The integrated lens profile achieves a divergence angle smaller than 0.7◦, which is close to that of a collimator. The proposed photonic platform provides the premise for low-cost and small-footprint single-chip OCT systems.
AB - In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45◦ reflecting mirror that directs the light from the interferometer to the collimator. The proposed integration process simplifies the fabrication of an interferometric system and inherently overcomes the complexity of costly alignment procedures while complying with the necessarily stringent optical constraints. Fabricated waveguide characterization shows total optical losses as low as 3 dB, and less than 1 dB of additional loss due to the Si 45◦ mirror facet. The alignment standard deviation of all components is within 15 nm. The integrated lens profile achieves a divergence angle smaller than 0.7◦, which is close to that of a collimator. The proposed photonic platform provides the premise for low-cost and small-footprint single-chip OCT systems.
UR - http://www.scopus.com/inward/record.url?scp=85077371375&partnerID=8YFLogxK
U2 - 10.1364/AO.59.000180
DO - 10.1364/AO.59.000180
M3 - Article
SN - 1559-128X
VL - 59
SP - 180
EP - 189
JO - Applied Optics
JF - Applied Optics
IS - 1
ER -