Self-Cleaning Micro-Windows for In-Tailpipe Optical Exhaust Gas Measurements

Amir Ghaderi, L.M. Middelburg, David Bilby, J.H. Visser, Per Lundgren, Peter Enoksson, R.F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Exhaust gas measurement in the harsh environment of the tailpipe of a combustion engine by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of particulate matter (PM). The considerations are presented for the systematic design of membranes with integrated heaters in SiC-on-Si technology for generating a well-defined lateral temperature profile with peak temperatures above 600 °C. Periodically raising the temperature of the membranes to such a level is demonstrated to keep the surface transparent by oxidation of soot deposits. This paper is about continuous heating of the membrane to a temperature slightly higher than that of the exhaust gas. At such temperatures thermophoretic repulsion of PM allows allows long-term optical measurement in the exhaust without the thermo-mechanical loading by repetitive thermal cycling.
Original languageEnglish
Title of host publication2020 IEEE 29th International Symposium on Industrial Electronics, ISIE 2020 - Proceedings
Number of pages5
ISBN (Electronic) 978-1-7281-5635-4
Publication statusPublished - 2020
Event29th IEEE International Symposium on Industrial Electronics - Delft, Netherlands
Duration: 17 Jun 202019 Jun 2020

Publication series

NameIEEE International Symposium on Industrial Electronics


Conference29th IEEE International Symposium on Industrial Electronics
Abbreviated titleISIE 2020
OtherVirtual/online event due to COVID-19
Internet address

Bibliographical note

Virtual/online event due to COVID-19


  • Exhaust gas measurement
  • Membrane
  • Optical MEMS
  • Optically transparent window
  • Soot deposition

Cite this