Self-Sealing Complex Oxide Resonators

Martin Lee, Martin P. Robin, Ruben H. Guis, Ulderico Filippozzi, Dong Hoon Shin, Thierry C. Van Thiel, Stijn P. Paardekooper, Johannes R. Renshof, Herre S.J. Van Der Zant, Andrea D. Caviglia, Gerard J. Verbiest, Peter G. Steeneken

Research output: Contribution to journalArticleScientificpeer-review

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Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.

Original languageEnglish
Pages (from-to)1475-1482
Number of pages8
JournalNano Letters
Issue number4
Publication statusPublished - 2022


  • Complex oxides
  • Membranes
  • Nanomechanics
  • NEMS
  • Perovskites
  • Pressure sensors

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