Self-Sealing Complex Oxide Resonators

Research output: Contribution to journalArticleScientificpeer-review

13 Downloads (Pure)

Abstract

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.

Original languageEnglish
Pages (from-to)1475-1482
Number of pages8
JournalNano Letters
Volume22
Issue number4
DOIs
Publication statusPublished - 2022

Keywords

  • Complex oxides
  • Membranes
  • Nanomechanics
  • NEMS
  • Perovskites
  • Pressure sensors

Fingerprint

Dive into the research topics of 'Self-Sealing Complex Oxide Resonators'. Together they form a unique fingerprint.

Cite this