Self-sensing actuation and damping of a piezoelectric tube scanner for atomic force microscopy

S Kuiper, G Schitter

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Piezoelectric tube scanners are typically used in atomic force microscopy (AFM) to prove the scanning motion of the sample. Excitation of the weakly damped fundamental resonance of the tube scanner leads to oscillations that can cause severe image distortion. This paper presents self-sensing actuation of a piezoelectric tube scanner in order to actively damp the fundamental resonance. By electrically connection the tube scanner in a capacitive bridge-circuit, the scanner oscillations can be measured without the need for expensive position sensors. In order to compensate for circuit imbalance caused by hysteresis an adaptation circuit is use. The obtained measurement signal is used for feedback control, adding 18dB of damping to the scanners fundamental resonant mode. AFM images are obtained showing a significant reduction in image distortion compared to the uncontrolled case.
Original languageUndefined/Unknown
Title of host publicationProceedings of the European Control Conference 2009
Editors Keviczky,L.
Place of PublicationBudapest, Hungary
Number of pages6
ISBN (Print)978-963-311-369-1
Publication statusPublished - 2009
EventEuropean Control Conference 2009 - Budapest, Hungary
Duration: 23 Aug 200926 Aug 2009

Publication series



ConferenceEuropean Control Conference 2009


  • Conf.proc. > 3 pag

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