SEM investigation in thickness of chromiumnitride layers on a silicon substrate

J Kiersch, WG Sloof

    Research output: Book/ReportReportProfessional

    Original languageUndefined/Unknown
    Place of Publicationonbekend
    Publishersect Microstructural Control in Metals (TM/MCM)
    Number of pages2
    Publication statusPublished - 2002

    Publication series

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    Publishersect Microstructural Control in Metals (TM/MCM)

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