| Original language | English |
|---|---|
| IPC | H01L, G06N |
| Publication status | Published - 2021 |
Semiconductor-superconductor hybrid device and fabrication thereof
N. van Loo (Inventor), G.P. Mazur (Inventor)
Research output: Patent
N. van Loo (Inventor), G.P. Mazur (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | H01L, G06N |
| Publication status | Published - 2021 |