Semiconductor-superconductor hybrid device and fabrication thereof

N. van Loo (Inventor), G.P. Mazur (Inventor)

Research output: Patent

1 Patent

1 results

Filter

2021

Semiconductor-superconductor hybrid device and fabrication thereof
van Loo, N. & Mazur, G. P., 2021, IPC No. H01L, G06N, Priority No. WO 2021170252 A1
Research output: Patent