Sensitive capacitive pressure sensors based on graphene membrane arrays

Makars Šiškins; Martin Lee; Dominique Wehenkel; Richard van Rijn; Tijmen W. de Jong; Johannes R. Renshof; Berend C. Hopman; Willemijn S.J.M. Peters; Dejan Davidovikj; Herre S.J. van der Zant; Peter G. Steeneken

doi:10.1038/s41378-020-00212-3

Sensitive capacitive pressure sensors based on graphene membrane arrays

Makars Šiškins^*, Martin Lee, Dominique Wehenkel, Richard van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, Dejan Davidovikj, Herre S.J. van der Zant, Peter G. Steeneken

^*Corresponding author for this work

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Abstract

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa⁻¹ mm⁻², thereby outperforming the commercial sensors.

Original language	English
Article number	102
Number of pages	9
Journal	Microsystems and Nanoengineering
Volume	6
Issue number	1
DOIs	https://doi.org/10.1038/s41378-020-00212-3
Publication status	Published - 2020

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title = "Sensitive capacitive pressure sensors based on graphene membrane arrays",

abstract = "The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.",

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AU - Šiškins, Makars

AU - Lee, Martin

AU - Wehenkel, Dominique

AU - van Rijn, Richard

AU - de Jong, Tijmen W.

AU - Renshof, Johannes R.

AU - Hopman, Berend C.

AU - Peters, Willemijn S.J.M.

AU - Davidovikj, Dejan

AU - van der Zant, Herre S.J.

AU - Steeneken, Peter G.

PY - 2020

Y1 - 2020

N2 - The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.

AB - The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.

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Sensitive capacitive pressure sensors based on graphene membrane arrays

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