Sensitive capacitive pressure sensors based on graphene membrane arrays

Makars Šiškins*, Martin Lee, Dominique Wehenkel, Richard van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, Dejan Davidovikj, Herre S.J. van der Zant, Peter G. Steeneken

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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Engineering