Shack-Hartmann reflective micro profilometer

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We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no reference beam in the setup, which simplifies the system. With a preregistered reference, the OPD image can be reconstructed from a single shot. Also, the method has a rather relaxed requirement on the illumination coherence, thus a cheap light source such as a LED is feasible in the setup. In our previous research, we have successfully verified that a conventional transmissive microscope can be transformed into an optical path difference microscope by using a Shack-Hartmann wavefront sensor under incoherent illumination. The key condition is that the numerical aperture of illumination should be smaller than the numerical aperture of imaging lens. This approach is also applicable to characterization of reflective and slightly scattering surfaces.
Original languageEnglish
Article number106160M
Number of pages7
JournalProceedings of SPIE- International Society for Optical Engineering
Publication statusPublished - 2017
EventInternational Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments - Beijing, China
Duration: 28 Oct 201730 Oct 2017


  • microscope
  • wavefront sensing
  • optical profilometer
  • phase imaging


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