Shallow junction formation by laser annealing

JWT Heemskerk, C Ortiz, JHCM Slabbekoorn, TLM Scholtes, LK Nanver

Research output: Book/Report › Report › Professional

Name
Publisher	ECTM/Dimes

Keywords

@book{185065b1c7c94ad19653e94d34f45b27,

title = "Shallow junction formation by laser annealing",

keywords = "Elektrotechniek, Techniek, Geen BTA classificatie",

author = "JWT Heemskerk and C Ortiz and JHCM Slabbekoorn and TLM Scholtes and LK Nanver",

year = "2002",

language = "Undefined/Unknown",

volume = "PACD Project A1",

publisher = "ECTM/Dimes",

}