@inproceedings{f40cd11cd07c4d8e940ed80d72a2df9a,
title = "Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode",
author = "AT Tran and TSY Moh and G Pandraud and H Schellevis and AB Akhnoukh and PM Sarro",
year = "2013",
doi = "10.1109/Transducers.2013.6627039",
language = "English",
isbn = "978-1-4673-5983-2",
publisher = "IEEE Society",
pages = "1396--1399",
editor = "JR Morante and C Hierold",
booktitle = "Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII",
note = "Transducers 2013 & Eurosensors XXVII, Barcelona, Spain ; Conference date: 16-06-2013 Through 20-06-2013",
}