Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

AT Tran; TSY Moh; G Pandraud; H Schellevis; AB Akhnoukh; PM Sarro

doi:10.1109/Transducers.2013.6627039

Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

AT Tran
, TSY Moh
, G Pandraud
, H Schellevis
, AB Akhnoukh
, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII
Editors	JR Morante, C Hierold
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	1396-1399
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6627039
Publication status	Published - 2013
Event	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain - Piscataway, NJ, USA Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name
Publisher	IEEE

Conference

Conference	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain
Period	16/06/13 → 20/06/13

Access to Document

10.1109/Transducers.2013.6627039

Cite this

Tran, AT., Moh, TSY., Pandraud, G., Schellevis, H., Akhnoukh, AB., & Sarro, PM. (2013). Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode. In JR. Morante, & C. Hierold (Eds.), Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII (pp. 1396-1399). IEEE. https://doi.org/10.1109/Transducers.2013.6627039

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title = "Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode",

author = "AT Tran and TSY Moh and G Pandraud and H Schellevis and AB Akhnoukh and PM Sarro",

year = "2013",

doi = "10.1109/Transducers.2013.6627039",

language = "English",

isbn = "978-1-4673-5983-2",

publisher = "IEEE",

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editor = "JR Morante and C Hierold",

booktitle = "Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXVII",

address = "United States",

note = "Transducers 2013 \& Eurosensors XXVII, Barcelona, Spain ; Conference date: 16-06-2013 Through 20-06-2013",

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Tran, AT, Moh, TSY, Pandraud, G, Schellevis, H, Akhnoukh, AB & Sarro, PM 2013, Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode. in JR Morante & C Hierold (eds), Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII. IEEE, Piscataway, NJ, USA, pp. 1396-1399, Transducers 2013 & Eurosensors XXVII, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627039

Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode. / Tran, AT; Moh, TSY; Pandraud, G et al.
Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII. ed. / JR Morante; C Hierold. Piscataway, NJ, USA: IEEE, 2013. p. 1396-1399.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode

AU - Tran, AT

AU - Moh, TSY

AU - Pandraud, G

AU - Schellevis, H

AU - Akhnoukh, AB

AU - Sarro, PM

PY - 2013

Y1 - 2013

U2 - 10.1109/Transducers.2013.6627039

DO - 10.1109/Transducers.2013.6627039

M3 - Conference contribution

SN - 978-1-4673-5983-2

SP - 1396

EP - 1399

BT - Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII

A2 - Morante, JR

A2 - Hierold, C

PB - IEEE

CY - Piscataway, NJ, USA

T2 - Transducers 2013 & Eurosensors XXVII, Barcelona, Spain

Y2 - 16 June 2013 through 20 June 2013

ER -

Tran AT, Moh TSY, Pandraud G, Schellevis H, Akhnoukh AB, Sarro PM. Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode. In Morante JR, Hierold C, editors, Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII. Piscataway, NJ, USA: IEEE. 2013. p. 1396-1399 doi: 10.1109/Transducers.2013.6627039