Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K

M Mihailovic, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionProfessional

Original languageUndefined/Unknown
Title of host publicationProceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)
EditorsPJ French
Place of PublicationVeldhoven, the Netherlands
PublisherSTW Technology Foundation
Pages36-39
Number of pages4
ISBN (Print)978-90-73461-62-8
Publication statusPublished - 2009
Event12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE) - Veldhoven, the Netherlands
Duration: 26 Nov 200927 Nov 2009

Publication series

Name
PublisherSTW Technology Foundation

Conference

Conference12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)
Period26/11/0927/11/09

Keywords

  • Vakpubl., Overig wet. > 3 pag

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