Shot noise in electron-beam lithography and line-width measurements

P Kruit, S. Steenbrink

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	20-26
Number of pages	7
Journal	Scanning: the journal of scanning microscopies
Volume	28
Issue number	1
Publication status	Published - 2006

Keywords

@article{94e9dd2757bc470584a8138184d73eab,

title = "Shot noise in electron-beam lithography and line-width measurements",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "P Kruit and S. Steenbrink",

year = "2006",

language = "Undefined/Unknown",

volume = "28",

pages = "20--26",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley & Sons",

number = "1",

}