Shot noise in electron-beam lithography and line-width measurements

P Kruit, S. Steenbrink

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)20-26
    Number of pages7
    JournalScanning: the journal of scanning microscopies
    Volume28
    Issue number1
    Publication statusPublished - 2006

    Keywords

    • academic journal papers
    • CWTS JFIS < 0.75

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