Shot noise in electron beam lithography and line width measurements

P Kruit, S. Steenbrink

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	67-68
Number of pages	2
Journal	Scanning: the journal of scanning microscopies
Volume	27
Issue number	2
Publication status	Published - 2005

Keywords

@article{80aeac74cb2f45ee814748b233df00e9,

title = "Shot noise in electron beam lithography and line width measurements",

keywords = "ZX CWTS JFIS < 1.00",

author = "P Kruit and S. Steenbrink",

year = "2005",

language = "Undefined/Unknown",

volume = "27",

pages = "67--68",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley and Sons",

number = "2",

}