Si adhesion interlayer effects in hydrogen passivated Si/W soft X-ray multilayer mirrors

MJH Kessels, J Verhoeven, FD Tichelaar, F Bijkerk

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{28b4ce9ea4c74600ad9da3ee46b24cdb,

title = "Si adhesion interlayer effects in hydrogen passivated Si/W soft X-ray multilayer mirrors",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "MJH Kessels and J Verhoeven and FD Tichelaar and F Bijkerk",

year = "2006",

language = "Undefined/Unknown",

volume = "600",

pages = "1405--1408",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "6",

}