Si made amorphous by Ar implantation in a Si-SiO2-Al multilayer

    Research output: Book/ReportReportProfessional

    Original languageUndefined/Unknown
    Place of Publicationonbekend
    Publisherunit Dimes-Nanophysics (NS/ALG Dimes)
    Publication statusPublished - 2003

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    Publisherunit Dimes-Nanophysics (NS/ALG Dimes)

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