@inproceedings{38da0e1eb22143fbb7fad260632affd7,
title = "SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "G Pandraud and L Pakula and TMH Pham and PJ French and PM Sarro",
note = "ed. is niet bekend; null ; Conference date: 25-11-2004 Through 26-11-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "90-73461-43-X",
publisher = "STW Technology Foudation",
pages = "1--4",
booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",
}