SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor

G Pandraud, L Pakula, TMH Pham, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics
Place of PublicationUtrecht
PublisherSTW Technology Foudation
Pages1-4
Number of pages4
ISBN (Print)90-73461-43-X
Publication statusPublished - 2004
EventSemiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht
Duration: 25 Nov 200426 Nov 2004

Publication series

Name
PublisherSTW Technology Foudation

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, The Netherlands
Period25/11/0426/11/04

Keywords

  • Vakpubl., Overig wet. > 3 pag

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