SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor

G Pandraud, L Pakula, TMH Pham, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	STW Technology Foudation
Pages	1-4
Number of pages	4
ISBN (Print)	90-73461-43-X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Name
Publisher	STW Technology Foudation

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/04 → 26/11/04

Keywords

@inproceedings{38da0e1eb22143fbb7fad260632affd7,

title = "SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "G Pandraud and L Pakula and TMH Pham and PJ French and PM Sarro",

note = "ed. is niet bekend; null ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43-X",

publisher = "STW Technology Foudation",

pages = "1--4",

booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",

}

SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. Utrecht : STW Technology Foudation, 2004. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor

AU - Pandraud, G

AU - Pakula, L

AU - Pham, TMH

AU - French, PJ

AU - Sarro, PM

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43-X

SP - 1

EP - 4

BT - SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics

PB - STW Technology Foudation

CY - Utrecht

Y2 - 25 November 2004 through 26 November 2004

ER -