SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

G Lorito, V Gonda, TLM Scholtes, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. 26th international conference on microelectronics
EditorsN Stojadinovic
Place of Publications.l.
Publishers.n.
Pages291-294
Number of pages4
ISBN (Print)978-1-4244-1881-7
Publication statusPublished - 2008
EventMIEL 2008, Nis, Serbia - Nis, Serbia
Duration: 11 May 200814 May 2008

Publication series

Name
Publishers.n.

Conference

ConferenceMIEL 2008, Nis, Serbia
Period11/05/0814/05/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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