Signal separator for a multi-beam charged particle inspection apparatus

Pieter Kruit (Inventor), Ron Naftali (Inventor)

Research output: Patent

1 Patent

1 results

2019

Signal separator for Multi electron beam inspection apparatus
Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,504,687, Priority date 20 Feb 2018
Research output: Patent