Research output per year
Research output per year
| Original language | English |
|---|---|
| Patent number | US 10,504,687 |
| IPC | H01J |
| Priority date | 20/02/18 |
| Publication status | Published - 2019 |
Bibliographical note
Patent: OCT-16-085applicant: TU Delft
Research output
- 1 Patent
-
Signal separator for a multi-beam charged particle inspection apparatus
Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO2019/164391Research output: Patent