@article{712a66c2ac6b4374984d514992400a58,
title = "Significant role of phase mask structures in extreme ultraviolet lithopgraphy to achieve near-wavelength resolution. IN PRESS",
keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "AM Nugrowati and SF Pereira and JJM Braat",
year = "2009",
language = "Undefined/Unknown",
volume = "00",
pages = "00--00",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "00",
}