Silicon-based MEMS micro-evaporator

J Hao; M Mihailovic; CM Rops; JF Creemer; PM Sarro

Silicon-based MEMS micro-evaporator

J Hao, M Mihailovic, CM Rops, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of 20th Micromechanics Europe Workshop (MME)
Editors	P Pons
Place of Publication	Toulouse, France
Publisher	LAAS-CNRS
Pages	1-4
Number of pages	4
Publication status	Published - 2009
Event	20th Micromechanics Europe Workshop (MME), Toulouse, France - Toulouse, France Duration: 20 Sept 2009 → 22 Sept 2009

Publication series

Name
Publisher	LAAS-CNRS

Conference

Conference	20th Micromechanics Europe Workshop (MME), Toulouse, France
Period	20/09/09 → 22/09/09

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{5b4b9d28b59848208a839ae0a7a4ee35,

title = "Silicon-based MEMS micro-evaporator",

keywords = "Conf.proc. > 3 pag",

author = "J Hao and M Mihailovic and CM Rops and JF Creemer and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

publisher = "LAAS-CNRS",

pages = "1--4",

editor = "P Pons",

booktitle = "Proceedings of 20th Micromechanics Europe Workshop (MME)",

note = "20th Micromechanics Europe Workshop (MME), Toulouse, France ; Conference date: 20-09-2009 Through 22-09-2009",

}

TY - GEN

T1 - Silicon-based MEMS micro-evaporator

AU - Hao, J

AU - Mihailovic, M

AU - Rops, CM

AU - Creemer, JF

AU - Sarro, PM

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

UR - http://www.mme2009.org/proceedings/Proceedings-final-complet.pdf

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of 20th Micromechanics Europe Workshop (MME)

A2 - Pons, P

PB - LAAS-CNRS

CY - Toulouse, France

T2 - 20th Micromechanics Europe Workshop (MME), Toulouse, France

Y2 - 20 September 2009 through 22 September 2009

ER -

Silicon-based MEMS micro-evaporator

Publication series

Conference

Keywords

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Cite this