@inproceedings{3a6194300bc24cc79f2f32d0cdc92a54,
title = "Silicon bulk micromachining: from sub-mm to nm 3D structuring,",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "PM Sarro",
year = "2006",
language = "Undefined/Unknown",
isbn = "91-631-9281-0",
publisher = "P. Enoksson Ed.",
pages = "--",
editor = "s.n.",
booktitle = "Proceeding of The 20th European Conference on Solid-State Transducers (Eurosensors XX)",
note = "The 20th European Conference on Solid-State Transducers (Eurosensors XX) ; Conference date: 17-09-2006 Through 20-09-2006",
}