Silicon bulk micromachining: from sub-mm to nm 3D structuring,

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceeding of The 20th European Conference on Solid-State Transducers (Eurosensors XX)
Editors s.n.
Place of PublicationGoteborg, Sweden
PublisherP. Enoksson Ed.
Pages-
ISBN (Print)91-631-9281-0
Publication statusPublished - 2006
EventThe 20th European Conference on Solid-State Transducers (Eurosensors XX) - Goteborg, Sweden
Duration: 17 Sep 200620 Sep 2006

Publication series

Name
PublisherP. Enoksson Ed.

Conference

ConferenceThe 20th European Conference on Solid-State Transducers (Eurosensors XX)
Period17/09/0620/09/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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