Silicon carbide as a new MEMS technology

Research output: Contribution to journalArticleScientificpeer-review

353 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)210-218
Number of pages9
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume82
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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