Silicon carbide as a new MEMS technology

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	210-218
Number of pages	9
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	82
Publication status	Published - 2000

Keywords

@article{e2572de73d0c4f50b1fa7b5a478ff4e5,

title = "Silicon carbide as a new MEMS technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PM Sarro",

year = "2000",

language = "Undefined/Unknown",

volume = "82",

pages = "210--218",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Silicon carbide as a new MEMS technology

AU - Sarro, PM

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0924-4247

VL - 82

SP - 210

EP - 218

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -