Silicon carbide membrane relative humidity sensor with aluminium electrodes

E Connolly; HMT Pham; J Groeneweg; PM Sarro; PJ French

Silicon carbide membrane relative humidity sensor with aluminium electrodes

E Connolly, HMT Pham, J Groeneweg, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

10 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	193-196
Number of pages	4
ISBN (Print)	0-7803-8265-X
Publication status	Published - 2004
Event	17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands - Piscataway Duration: 25 Jan 2004 → 29 Jan 2004

Publication series

Name
Publisher	IEEE

Conference

Conference	17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands
Period	25/01/04 → 29/01/04

Bibliographical note

ed. is niet bekend

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{01dc5bf4783d4e2f94ae055271d1c9a1,

title = "Silicon carbide membrane relative humidity sensor with aluminium electrodes",

keywords = "Conf.proc. > 3 pag",

author = "E Connolly and HMT Pham and J Groeneweg and PM Sarro and PJ French",

note = "ed. is niet bekend; 17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands ; Conference date: 25-01-2004 Through 29-01-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-7803-8265-X",

publisher = "IEEE Society",

pages = "193--196",

booktitle = "MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems",

}

Connolly, E, Pham, HMT, Groeneweg, J, Sarro, PM & French, PJ 2004, Silicon carbide membrane relative humidity sensor with aluminium electrodes. in MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems. IEEE Society, Piscataway, pp. 193-196, 17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands, 25/01/04.

Silicon carbide membrane relative humidity sensor with aluminium electrodes. / Connolly, E; Pham, HMT; Groeneweg, J et al.
MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems. Piscataway: IEEE Society, 2004. p. 193-196.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Silicon carbide membrane relative humidity sensor with aluminium electrodes

AU - Connolly, E

AU - Pham, HMT

AU - Groeneweg, J

AU - Sarro, PM

AU - French, PJ

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-8265-X

SP - 193

EP - 196

BT - MEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems

PB - IEEE Society

CY - Piscataway

T2 - 17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands

Y2 - 25 January 2004 through 29 January 2004

ER -