Silicon carbide membrane relative humidity sensor with aluminium electrodes

E Connolly, HMT Pham, J Groeneweg, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

10 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationMEMS 2004 technical digest; 17th IEEE international conference on micro electro mechanical systems
Place of PublicationPiscataway
PublisherIEEE Society
Pages193-196
Number of pages4
ISBN (Print)0-7803-8265-X
Publication statusPublished - 2004
Event17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands - Piscataway
Duration: 25 Jan 200429 Jan 2004

Publication series

Name
PublisherIEEE

Conference

Conference17th IEEE international conference on micro electro mechanical systems, Maastricht. The Netherlands
Period25/01/0429/01/04

Keywords

  • Conf.proc. > 3 pag

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