Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems

Jiarui Mo; Shreyas Shankar; Guoqi  Zhang; Sten Vollebregt

doi:10.1109/MEMS49605.2023.10052162

Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems

Jiarui Mo, Shreyas Shankar, Guoqi Zhang, Sten Vollebregt

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.

Original language	English
Title of host publication	Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Danvers
Publisher	IEEE
Pages	72-75
Number of pages	4
ISBN (Electronic)	978-1-6654-9308-6
ISBN (Print)	978-1-6654-9309-3
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052162
Publication status	Published - 2023
Event	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Munich, Germany Duration: 15 Jan 2023 → 19 Jan 2023 Conference number: 36th

Conference

Conference	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	Germany
City	Munich
Period	15/01/23 → 19/01/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

SiC-CNT composite
HAR structures
harsh environment
thermal actuator

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10.1109/MEMS49605.2023.10052162

Silicon_Carbide_Reinforced_Vertically_Aligned_Carbon_Nanotube_Composite_for_Harsh_Environment_MemsFinal published version, 3.16 MB

Cite this

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title = "Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems",

abstract = "Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.",

keywords = "SiC-CNT composite, HAR structures, harsh environment, thermal actuator",

author = "Jiarui Mo and Shreyas Shankar and Guoqi Zhang and Sten Vollebregt",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 15-01-2023 Through 19-01-2023",

year = "2023",

doi = "10.1109/MEMS49605.2023.10052162",

language = "English",

isbn = "978-1-6654-9309-3",

pages = "72--75",

booktitle = "Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE ",

address = "United States",

}

Mo, J , Shankar, S , Zhang, G & Vollebregt, S 2023, Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems. in Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , Danvers, pp. 72-75, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Munich, Germany, 15/01/23. https://doi.org/10.1109/MEMS49605.2023.10052162

Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems. / Mo, Jiarui ; Shankar, Shreyas ; Zhang, Guoqi et al.

Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). Danvers : IEEE , 2023. p. 72-75.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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N2 - Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.

AB - Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.

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Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems

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Conference

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Keywords

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