Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.
|Title of host publication||Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Place of Publication||Danvers|
|Number of pages||4|
|Publication status||Published - 2023|
|Event||2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Munich, Germany|
Duration: 15 Jan 2023 → 19 Jan 2023
Conference number: 36th
|Conference||2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Period||15/01/23 → 19/01/23|
Bibliographical noteGreen Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
- SiC-CNT composite
- HAR structures
- harsh environment
- thermal actuator