Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

V Rajaraman; G de Graaf; PJ French; KAA Makinwa; RF Wolffenbuttel

Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

V Rajaraman, G de Graaf, PJ French, KAA Makinwa, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 21st Micromechanics and Micro systems Europe 2010 Conference
Editors	J van Honschoten, H Verputten, H Groenland
Place of Publication	Enschede, The Netherlands
Publisher	MME
Pages	20-23
Number of pages	4
Publication status	Published - 2010
Event	MME 2010: Micromechanics and Microsystems Europe Workshop - Enschede, The Netherlands Duration: 26 Sept 2010 → 29 Sept 2010

Publication series

Name
Publisher	MME2010

Conference

Conference	MME 2010
Period	26/09/10 → 29/09/10

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{a2d2205561d44f8c81cac26260fce865,

title = "Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer",

keywords = "Conf.proc. > 3 pag",

author = "V Rajaraman and {de Graaf}, G and PJ French and KAA Makinwa and RF Wolffenbuttel",

year = "2010",

language = "English",

publisher = "MME",

pages = "20--23",

editor = "{van Honschoten}, J and H Verputten and H Groenland",

booktitle = "Proceedings 21st Micromechanics and Micro systems Europe 2010 Conference",

note = " MME 2010 : Micromechanics and Microsystems Europe Workshop ; Conference date: 26-09-2010 Through 29-09-2010",

}

Rajaraman, V, de Graaf, G , French, PJ , Makinwa, KAA & Wolffenbuttel, RF 2010, Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer. in J van Honschoten, H Verputten & H Groenland (eds), Proceedings 21st Micromechanics and Micro systems Europe 2010 Conference. MME, Enschede, The Netherlands, pp. 20-23, MME 2010, 26/09/10.

Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer. / Rajaraman, V; de Graaf, G ; French, PJ et al.
Proceedings 21st Micromechanics and Micro systems Europe 2010 Conference. ed. / J van Honschoten; H Verputten; H Groenland. Enschede, The Netherlands: MME, 2010. p. 20-23.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

AU - Rajaraman, V

AU - de Graaf, G

AU - French, PJ

AU - Makinwa, KAA

AU - Wolffenbuttel, RF

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 20

EP - 23

BT - Proceedings 21st Micromechanics and Micro systems Europe 2010 Conference

A2 - van Honschoten, J

A2 - Verputten, H

A2 - Groenland, H

PB - MME

CY - Enschede, The Netherlands

T2 - MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -