Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 21st Micromechanics and Micro systems Europe 2010 Conference
EditorsJ van Honschoten, H Verputten, H Groenland
Place of PublicationEnschede, The Netherlands
PublisherMME
Pages20-23
Number of pages4
Publication statusPublished - 2010
Event MME 2010: Micromechanics and Microsystems Europe Workshop - Enschede, The Netherlands
Duration: 26 Sep 201029 Sep 2010

Publication series

Name
PublisherMME2010

Conference

Conference MME 2010
Period26/09/1029/09/10

Keywords

  • Conf.proc. > 3 pag

Cite this