@inproceedings{575b730c62364602af18c953c68691ea,
title = "Silicon compatible Fabry-perot optical filters for mid-IR microspectrometer applications (U-SP-2-I-ICT)",
keywords = "Elektrotechniek, Techniek, professional journal papers, Conf.proc. > 3 pag",
author = "A Emadi and {de Graaf}, G and RF Wolffenbuttel and JHG Correia",
year = "2006",
language = "Undefined/Unknown",
isbn = "91-631-9281-0",
publisher = "Eurosensors",
pages = "1--4",
editor = "s.n.",
booktitle = "Silicon compatible Fabry-perot optical filters for mid-IR microspectrometer applications",
note = "Eurosensors XX ; Conference date: 17-09-2006 Through 20-09-2006",
}