SILICON DOPING TECHNIQUES USING CHEMICAL VAPOR DOPANT DEPOSITION

M Popadic

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Nanver, Lis, Supervisor
Award date	12 Nov 2009
Place of Publication	Zutphen, the Netherlands
Publisher	CPI, Wohrmann Print Servic
Print ISBNs	978-90-8570-422-5
Publication status	Published - 2009

Keywords

@phdthesis{cce6a80818c8436b84c6f34e2e6e7fb4,

title = "SILICON DOPING TECHNIQUES USING CHEMICAL VAPOR DOPANT DEPOSITION",

keywords = "Diss. prom. aan TU Delft",

author = "M Popadic",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-90-8570-422-5",

publisher = "CPI, Wohrmann Print Servic",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}