Silicon films deposited from hydrogen diluted silane using a layer-by-layer approach

G van Elzakker, FD Tichelaar, M Zeman

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (SciVal)

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@article{41d8b552e9a0453bae30e698f1f26bb8,

title = "Silicon films deposited from hydrogen diluted silane using a layer-by-layer approach",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Elzakker}, G and FD Tichelaar and M Zeman",

year = "2007",

language = "Undefined/Unknown",

volume = "515",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}