Silicon MEMS for detection of solid and liquid fronts

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Sarro, P.M., Supervisor French, P.J., Advisor Liu, ZW, Advisor, External person Roozeboom, F, Advisor, External person Staufer, U., Advisor Dekker, R., Advisor Pertijs, M.A.P., Advisor
Award date	13 Jul 2010
Place of Publication	Delft
Print ISBNs	9789085705840
Publication status	Published - 2010

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