Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Z Xiao, Min Chen, Guoying Wu, Changde Zhao, Dacheng Zhang, Yilong Hao, Guobing Zhang, ZH Li

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)113-119
    Number of pages7
    JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
    Publication statusPublished - 1999


    • ZX Int.klas.verslagjaar < 2002

    Cite this