Silicon micromachining for RF technology

PN Pham

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Burghartz, JN, Supervisor Sarro, P.M., Advisor French, P.J., Advisor Mokwa, W, Advisor, External person Slotboom, JW, Advisor Chien, ND, Advisor, External person Montree, AH, Advisor, External person
Award date	6 May 2003
Place of Publication	Rotterdam
Publisher	Pham Phuong Nga
Print ISBNs	90-6734-235-1
Publication status	Published - 2003

Keywords

@phdthesis{435d69eb34434bfb9b39a349c740d8e4,

title = "Silicon micromachining for RF technology",

keywords = "Diss. prom. aan TU Delft",

author = "PN Pham",

year = "2003",

language = "Undefined/Unknown",

isbn = "90-6734-235-1",

publisher = "Pham Phuong Nga",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}