Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10 8

M. Yuan, MA Cohen, GA Steele

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)263501-263504
    Number of pages4
    JournalApplied Physics Letters
    Volume107
    Issue number26
    DOIs
    Publication statusPublished - 2015

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