Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10 8

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@article{46fd4857bc114145bed5e6ecfc336cb5,

title = "Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10 8",

author = "M. Yuan and MA Cohen and GA Steele",

year = "2015",

doi = "10.1063/1.4938747",

language = "English",

volume = "107",

pages = "263501--263504",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "26",

}

TY - JOUR

T1 - Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10 8

AU - Yuan, M.

AU - Cohen, MA

AU - Steele, GA

PY - 2015

Y1 - 2015

UR - http://resolver.tudelft.nl/uuid:6887048c-bd04-49f3-a4a2-33adde085506

U2 - 10.1063/1.4938747

DO - 10.1063/1.4938747

M3 - Article

SN - 0003-6951

VL - 107

SP - 263501

EP - 263504

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

ER -