Silicon nitride nanosieve membrane

HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, M Elwenspoek

Research output: Contribution to journalArticleScientificpeer-review

233 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)283-287
Number of pages5
JournalNano Letters: a journal dedicated to nanoscience and nanotechnology
Volume4
Issue number2
Publication statusPublished - 2004

Keywords

  • ZX CWTS JFIS >= 3.00

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