Silicon nitride nanosieve membrane

HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, M Elwenspoek

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	283-287
Number of pages	5
Journal	Nano Letters: a journal dedicated to nanoscience and nanotechnology
Volume	4
Issue number	2
Publication status	Published - 2004

niet eerder opgenomen

Keywords

@article{c28fbda983794414b1b96292eea8e839,

title = "Silicon nitride nanosieve membrane",

keywords = "ZX CWTS JFIS >= 3.00",

author = "HD Tong and HV Jansen and VJ Gadgil and CG Bostan and E Berenschot and {van Rijn}, CJM and M Elwenspoek",

note = "niet eerder opgenomen",

year = "2004",

language = "Undefined/Unknown",

volume = "4",

pages = "283--287",

journal = "Nano Letters: a journal dedicated to nanoscience and nanotechnology",

issn = "1530-6984",

publisher = "American Chemical Society (ACS)",

number = "2",

}

TY - JOUR

T1 - Silicon nitride nanosieve membrane

AU - Tong, HD

AU - Jansen, HV

AU - Gadgil, VJ

AU - Bostan, CG

AU - Berenschot, E

AU - van Rijn, CJM

AU - Elwenspoek, M

N1 - niet eerder opgenomen

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS >= 3.00

M3 - Article

SN - 1530-6984

VL - 4

SP - 283

EP - 287

JO - Nano Letters: a journal dedicated to nanoscience and nanotechnology

JF - Nano Letters: a journal dedicated to nanoscience and nanotechnology

IS - 2

ER -