Silicon-on-Glass & Silicon-on-Insulator MEMS Acceleration (Inertial) Sensors - Design & Process Development

V Rajaraman

Research output: Book/Report › Report › Professional

Name
Publisher	NXP

Keywords

TY - BOOK

T1 - Silicon-on-Glass & Silicon-on-Insulator MEMS Acceleration (Inertial) Sensors - Design & Process Development

AU - Rajaraman, V

PY - 2008

Y1 - 2008

KW - official reports

KW - Geen BTA classificatie

KW - Geen VSNU-classificatie

M3 - Report

BT - Silicon-on-Glass & Silicon-on-Insulator MEMS Acceleration (Inertial) Sensors - Design & Process Development

PB - NXP

CY - The Netherlands

ER -