Silicon photodiodes for low penetration depth beams such as DUV/VUV/EUV light and low-energy electrons

LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Keywords

@inbook{5049e71ce74f47278a30b3574b2a416d,

title = "Silicon photodiodes for low penetration depth beams such as DUV/VUV/EUV light and low-energy electrons",

keywords = "authored books, Boekdeel internat.wet",

author = "LK Nanver",

year = "2011",

language = "English",

isbn = "978-953-307-163-3",

pages = "205--224",

editor = "{Dalla Betta}, GF",

booktitle = "Advances in photodiodes",

publisher = "Intech",

}

TY - CHAP

T1 - Silicon photodiodes for low penetration depth beams such as DUV/VUV/EUV light and low-energy electrons

AU - Nanver, LK

PY - 2011

Y1 - 2011

KW - authored books

KW - Boekdeel internat.wet

UR - http://www.scribd.com/doc/53932837/Advances-in-Photo-Diodes

M3 - Chapter

SN - 978-953-307-163-3

SP - 205

EP - 224

BT - Advances in photodiodes

A2 - Dalla Betta, GF

PB - Intech

CY - Rijeka, Croatia

ER -