Abstract
Future applications of photo-acoustic imaging require a matrix of small (wavelength/2) and sensitive ultrasound sensors with read-out through a flexible cable. Integrated optical sensors have good prospects: small and sensitive sensors, wafer-scale fabrication, and matrix read-out via single optical fiber using on-chip optical multiplexing. We propose a new type of opto-mechanical ultrasound sensor (OMUS) in silicon photonic chip technology. By using an acoustically resonant membrane in combination with an innovative split rib-type photonic waveguide, we achieve extremely high sensitivity. We present our experimental results in the frequency range up to 30 MHz.
Original language | English |
---|---|
DOIs | |
Publication status | Published - 2021 |
Externally published | Yes |
Event | SPIE Conference Photons Plus Ultrasound: Imaging and Sensing 2021 - Duration: 6 Mar 2021 → 12 Mar 2021 |
Conference
Conference | SPIE Conference Photons Plus Ultrasound: Imaging and Sensing 2021 |
---|---|
Period | 6/03/21 → 12/03/21 |