Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

M Aarts; J Wei; PM Sarro

Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)
Place of Publication	Kyoto
Publisher	IEEE
Pages	253-256
Number of pages	4
ISBN (Print)	978-1-4673-1124-3
Publication status	Published - 2012
Event	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan - Kyoto Duration: 5 Mar 2012 → 8 Mar 2012

Publication series

Name
Publisher	IEEE

Conference

Conference	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan
Period	5/03/12 → 8/03/12

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{4f818b942c554060957e580548f2b82f,

title = "Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "M Aarts and J Wei and PM Sarro",

year = "2012",

language = "English",

isbn = "978-1-4673-1124-3",

publisher = "IEEE",

pages = "253--256",

booktitle = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)",

address = "United States",

note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan ; Conference date: 05-03-2012 Through 08-03-2012",

}

Aarts, M, Wei, J & Sarro, PM 2012, Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency. in 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012). IEEE, Kyoto, pp. 253-256, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan, 5/03/12.

Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency. / Aarts, M; Wei, J ; Sarro, PM.
7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012). Kyoto: IEEE, 2012. p. 253-256.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

AU - Aarts, M

AU - Wei, J

AU - Sarro, PM

PY - 2012

Y1 - 2012

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4673-1124-3

SP - 253

EP - 256

BT - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)

PB - IEEE

CY - Kyoto

T2 - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan

Y2 - 5 March 2012 through 8 March 2012

ER -