Silicon-polymer electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency

M Aarts, J Wei, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publication7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)
Place of PublicationKyoto
PublisherIEEE Society
Pages253-256
Number of pages4
ISBN (Print)978-1-4673-1124-3
Publication statusPublished - 2012
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan - Kyoto
Duration: 5 Mar 20128 Mar 2012

Publication series

Name
PublisherIEEE

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 5-8 March 2012, Kyoto, Japan
Period5/03/128/03/12

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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