Silver-based reflective coatings for micromachined optical filters

M Bartek, JHG Correia, RF Wolffenbuttel

Research output: Contribution to journalArticleScientific

26 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)162-165
Number of pages4
JournalJournal of Micromechanics and Microengineering
Volume9
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this