This paper presents simulation and measurement results characterizing a novel design of an electro-thermally actuated micro-gripper for micro-particles manipulation. The gripper structure consists of a comb-like, high aspect ratio silicon frame with an integrated aluminum heater on top. The comb-structure trenches are filled with SU8, a photo-patternable polymer material. The gripper fabrication process makes use of standard semiconductor processing steps and materials. The presented gripper features a large maximum total jaw displacement of 68 µm at a driving voltage of 4 V and a total power consumption of 93,8 mW. the simulated force capability of the device is 0.57 mN per µm jaw displacement.
Key Words: Bimorph actuator, SU8 polymer, micro-gripper, FE simulation, electro-thermal-elastic coupling.
|Title of host publication||Technical Digest of the 18th MicroMechanics Europe (MME07)|
|Editors||JH Correia, A Cunha|
|Place of Publication||Guimaraes, Portugal|
|Number of pages||4|
|Publication status||Published - 2007|
|Event||18th MicroMechanics Europe (MME07) - Guimaraes, Portugal|
Duration: 16 Sep 2007 → 18 Sep 2007
|Conference||18th MicroMechanics Europe (MME07)|
|Period||16/09/07 → 18/09/07|
- conference contrib. refereed
- Conf.proc. > 3 pag