@inproceedings{9965ced3e25e44cb83e3b0f9e57c4d13,
title = "Simulation and Measurement of a Comb-Structure Silicon-Polymer Thermally Actuated Micro-Gripper",
abstract = "This paper presents simulation and measurement results characterizing a novel design of an electro-thermally actuated micro-gripper for micro-particles manipulation. The gripper structure consists of a comb-like, high aspect ratio silicon frame with an integrated aluminum heater on top. The comb-structure trenches are filled with SU8, a photo-patternable polymer material. The gripper fabrication process makes use of standard semiconductor processing steps and materials. The presented gripper features a large maximum total jaw displacement of 68 µm at a driving voltage of 4 V and a total power consumption of 93,8 mW. the simulated force capability of the device is 0.57 mN per µm jaw displacement. Key Words: Bimorph actuator, SU8 polymer, micro-gripper, FE simulation, electro-thermal-elastic coupling.",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "F Krecinic and {Chu Duc}, T and GK Lau and PM Sarro",
year = "2007",
language = "Undefined/Unknown",
isbn = "978-972-98603-3-1",
publisher = "MME",
pages = "215--218",
editor = "JH Correia and A Cunha",
booktitle = "Technical Digest of the 18th MicroMechanics Europe (MME07)",
note = "18th MicroMechanics Europe (MME07) ; Conference date: 16-09-2007 Through 18-09-2007",
}