Simulation and Measurement of a Comb-Structure Silicon-Polymer Thermally Actuated Micro-Gripper

F Krecinic, T Chu Duc, GK Lau, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


This paper presents simulation and measurement results characterizing a novel design of an electro-thermally actuated micro-gripper for micro-particles manipulation. The gripper structure consists of a comb-like, high aspect ratio silicon frame with an integrated aluminum heater on top. The comb-structure trenches are filled with SU8, a photo-patternable polymer material. The gripper fabrication process makes use of standard semiconductor processing steps and materials. The presented gripper features a large maximum total jaw displacement of 68 µm at a driving voltage of 4 V and a total power consumption of 93,8 mW. the simulated force capability of the device is 0.57 mN per µm jaw displacement. Key Words: Bimorph actuator, SU8 polymer, micro-gripper, FE simulation, electro-thermal-elastic coupling.
Original languageUndefined/Unknown
Title of host publicationTechnical Digest of the 18th MicroMechanics Europe (MME07)
EditorsJH Correia, A Cunha
Place of PublicationGuimaraes, Portugal
Number of pages4
ISBN (Print)978-972-98603-3-1
Publication statusPublished - 2007
Event18th MicroMechanics Europe (MME07) - Guimaraes, Portugal
Duration: 16 Sep 200718 Sep 2007

Publication series



Conference18th MicroMechanics Europe (MME07)


  • conference contrib. refereed
  • Conf.proc. > 3 pag

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