Simulation of chemical vapor deposition processes

CR Kleijn, Carlo Cavalotti

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Original languageEnglish
Title of host publicationCharacterization of materials - second edition
EditorsE.N. Kaufmann
Place of Publications.l.
PublisherWiley
Pages280-298
Number of pages2438
ISBN (Print)978-1-1181-1074-4
Publication statusPublished - 2012

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