Simulation of chemical vapor deposition processes

CR Kleijn, Carlo Cavalotti

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	English
Title of host publication	Characterization of materials - second edition
Editors	E.N. Kaufmann
Place of Publication	s.l.
Publisher	Wiley
Pages	280-298
Number of pages	2438
ISBN (Print)	978-1-1181-1074-4
Publication status	Published - 2012

Online ISBN 9780471266969
http://onlinelibrary.wiley.com/doi/10.1002/0471266965.com016.pub2/abstract

Cite this

@inbook{af5b6824e0a149d38e4d7c024804f4a2,

title = "Simulation of chemical vapor deposition processes",

author = "CR Kleijn and Carlo Cavalotti",

note = "Online ISBN 9780471266969 http://onlinelibrary.wiley.com/doi/10.1002/0471266965.com016.pub2/abstract",

year = "2012",

language = "English",

isbn = "978-1-1181-1074-4",

pages = "280--298",

editor = "E.N. Kaufmann",

booktitle = "Characterization of materials - second edition",

publisher = "Wiley",

}

TY - CHAP

T1 - Simulation of chemical vapor deposition processes

AU - Kleijn, CR

AU - Cavalotti, Carlo

N1 - Online ISBN 9780471266969 http://onlinelibrary.wiley.com/doi/10.1002/0471266965.com016.pub2/abstract

PY - 2012

Y1 - 2012

M3 - Chapter

SN - 978-1-1181-1074-4

SP - 280

EP - 298

BT - Characterization of materials - second edition

A2 - Kaufmann, E.N.

PB - Wiley

CY - s.l.

ER -