Simulation of Chemical Vapor Deposition Processes

    Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

    Original languageUndefined/Unknown
    Title of host publicationMethods in Materials Research: A Current Protocols Publication
    EditorsEN Kaufmann
    Place of PublicationNew York
    PublisherJohn Wiley & Sons
    Pages2a.7.1-2a.7.15
    Number of pages15
    Publication statusPublished - 2001

    Keywords

    • Boekdeel internat.wet

    Cite this

    Kleijn, CR. (2001). Simulation of Chemical Vapor Deposition Processes. In EN. Kaufmann (Ed.), Methods in Materials Research: A Current Protocols Publication (pp. 2a.7.1-2a.7.15). John Wiley & Sons.